DEDICATION ……………………………………………………………………………………………….. ii
ACKNOWLEDGEMENTS………………………………………………………………………………. iii
LIST OF TABLES…………………………………………………………………………………………….vi
LIST OF FIGURES……………………………………………………………………………………….. viii
LIST OF ABBREVIATIONS……………………………………………………………………………..xi
Chapter
I. INTRODUCTION ………………………………………………………………………………………..1
II. OXIDATION……………………………………………………………………………………………….4
Oxidation of ZrB2-SiC composite……………………………………………………………….4
Oxidation of Si………………………………………………………………………………………..6
Oxidation of Si3N4………………………………………………………………………………….13
Oxidation of SiC ……………………………………………………………………………………17
III. EXPERIMENTAL DETAILS……………………………………………………………………….19
Oxidation experiments ……………………………………………………………………………19
Pressure measurements …………………………………………………………………………..20
Temperature measurements……………………………………………………………………..21
O atom concentration measurement…………………………………………………………..21
Calibration of port A ………………………………………………………………………………23
Average O3 concentration measurements……………………………………………………26
Spectroscopic ellipsometry………………………………………………………………………26
Rutherford backscattering spectrometry …………………………………………………….27
IV. FINITE ELEMENT REACTOR MODEL……………………………………………………….31
۱۴٫ Measured and calculated thicknesses for oxidation of Si (100) for 3 hours at various
MWPs, at a mass flow rate of 2300 sccm (of 87% O2–۱۳% Ar gas mixture), 431.3 Pa
outlet pressure, and a furnace temperature of 1323 K ……………………………………………..85
۱۵٫ Parameters determined by fitting the model to the data for oxidation of LPCVD Si3N4
collected at 1183 K, at a mass flow rate of 2300 sccm (of 87% O2–۱۳% Ar gas mixture),
۴۳۱٫۳ Pa outlet pressure, and 80% maximum MWP for various αo……………………………93
۱۶٫ Parameters determined by fitting the model to the data for oxidation of LPCVD Si3N4
collected at 1323 K, at a mass flow rate of 2300 sccm (of 87% O2–۱۳% Ar gas mixture),
۴۳۱٫۳ Pa outlet pressure, and 80% maximum MWP for various αo……………………………94
۱۷٫ Parameters determined by fitting the model to the data for oxidation of CVD SiC
collected at 1183 K, at a mass flow rate of 2300 sccm (of 87% O2–۱۳% Ar gas mixture),
۴۳۱٫۳ Pa outlet pressure, and 80% maximum MWP for various αo……………………………95
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